Segmented-Channel MOSFET Design and Optimization – A Review
نویسنده
چکیده
The steady miniaturization of the conventional MOSFET resulted in continuous improvement in integratedcircuit cost and functionality. Planar bulk MOSFET designs face many challenges as they are being scaled down. A segmentedchannel MOSFET (SegFET) device design combines the benefits of both planar bulk MOSFETs and thin-body transistor structures. The salient feature of this device is that the channel is segmented. The base material of the device is a corrugated substrate consisting of multiple stripes which acts as the channel. The areas between these stripes are filled with high-k material (Hafnia/Zirconia). Device isolation materials are used to isolate the transistor. This device exhibits a higher performance, lower short channel effects and reduced power consumption. Keywords— SegFET, segmented, corrugated substrate, high-k material, Hafnia/Zirconia
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